Fabrication and Characterization of On-chip Chalcogenide Nano-waveguide Devices

Liying Liu,Qiming Zhang,Xiang Wu,Ming Li, Lei Xu

Frontiers in Optics（2010）

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摘要

Buried As2S3 nano-waveguides with size down to 200 nm on silicon wafer are prepared. The fabricated waveguide and micro-ring cavity show excellent optical properties. Optical nonlinearity of the nano-waveguides is characterized as well.

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关键词

on-chip,nano-waveguide

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