a-(Si,Ge):H,F Alloys Prepared from SiH4 and GeF4

The properties of a-(Si,Ge):H,F alloys prepared by glow discharge deposition from SiH4 and GeF4 are described. The measured IR absorption spectra, sub-gap absorption spectra, dark conduction activation energies, carrier drift mobilities and deep trapping lifetimes of these alloys are similar to those of alloys prepared from SiF4, GeF4, and H2. However, they have over an order of magnitude lower photoconductivity over most of the composition range. Infrared absorption measurements indicate that these alloys have a fluorine content less than 1.5 at.% and a Si-H2 content that increases with germanium concentration.