电子束光刻制备5000 line/mm光栅掩模关键技术研究朱效立,谢常青,赵珉,陈宝钦,叶甜春,牛洁斌,张庆钊, 刘明mag(2008)Cited 23|Views3No scoreAI Read ScienceMust-Reading TreeExampleGenerate MRT to find the research sequence of this paperChat PaperSummary is being generated by the instructions you defined