Two Cantilever Based Sytem For Viscosity And Density Monitoring

2015 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN)(2015)

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Abstract
Viscosity and density measurements in liquids in real-time is challenging. Previous MEMS based approaches use frequency sweeps for the purpose and those methods are slow and not real-time. We show that high precision viscosity and density measurements are possible using two cantilevers with different widths and by tracking their frequencies with a Phase-Locked-Loop in real-time.
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Key words
MEMS,Microcantilever Sensor,Viscosity,Density
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