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C12 RHEEDを用いたSic基板研磨表面のダメージ層評価(OS10 班磨技術(3))

浩司 小山,秀俊 武田,英雄 会田, 淳也 中田, 卓嘉 杉山, 亜希 戸坂,諭吉 重田

mag（2012）

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