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MAGIC: a European Program to Push the Insertion of Maskless Lithography

L. Pain,B. Icard,S. Tedesco,B. Kampherbeek, G. Gross,C. Klein,H. Loeschner,E. Platzgummer, R. Morgan,S. Manakli,J. Kretz, C. Holhe,K-H Choi,F. Thrum,E. Kassel,W. Pilz,K. Keil,J. Butschke,M. Irmscher,F. Letzkus,P. Hudek,A. Paraskevopoulos,P. Ramm, J. Weber

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE（2008）

引用 19|浏览19
关键词
e-beam,lithography,multi beam,mask less
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