Elastic Recoil Detection Of Depletion Layer Formation During Anodic Bonding

Conventional elastic recoil detection (ERD) techniques have been employed in an attempt to elucidate the effects time, temperature and alkali ion content have on depletion layer formation during anodic bonding. Hydrogen and/or lithium ion concentration profiles were evaluated for both untreated and lithium-treated sodium borosilicate glass. From in situ ERD, depletion layer formation is highly dependent on temperature and alkali ion content. Lithium-treated sodium borosilicate glass improves depletion layer formation at low temperatures and at high temperatures increased ion mobility results in rapid depletion layer formation.