3d Via Belt Technology

Three-dimensional die stacking with vertical interconnections through Si dies is potentially the best semiconductor system integration technique. With its incredibly promising improvements in speed and power dissipation in IC's, it has attracted increased attention in recent times. But this approach needs to perform through silicon vias at wafer level step and such wafers are not always available.This paper presents a 3D solution for interconnection of a base wafer with standard dies. Firstly, it consists in manufacturing copper pillars dedicated to vertical connection and manufactured around flip-chip position by electroplating. Then dies are connected to the substrate face-down by mu-insert technology. In order to obtain a new surface, the wafer is embedded in a polymer and planarized by grinding enabling copper pillars to be connected. A new rerouting and interconnection system enables a second die hybridization. This report presents the first manufacturing approaches and electrical results.