Diamond-like Carbon Film Deposition on an Artificial Heart Blood Pump Using a Flexible Type Electrode with R.f. Plasma CVD Processing
MRS proceedings/Materials Research Society symposia proceedings(2006)
摘要
Diamond-like carbon (DLC) film was deposited uniformly on an irregular structure such as a polyurethane artificial heart blood pump using a special 3-dimensional type electrode. Process of applying the DLC film coating is accomplished by inserting a large number of small metallic balls (φ0.8 mm chromium balls). It is then possible to adjust the shape of the electrode in such a way that the DLC film coating can be applied to the irregular surface of the artificial heart. In investigating the availability of the electrode, under helium (He) plasma, the plasma states were measured using double probe analysis. Lateral profiles of the electron temperature were higher in the centre and decreased towards the edges of the electrode. On the other hand, the plasma density profiles were lower in the centre part than at the edges. The electrode kept ion sheath on the artificial heart blood pump’s surface at self-bias voltage uniformly. The results were that the DLC film was deposited completely on the artificial heart blood pump at the film thickness of approximately 350 - 380 nm. Additionally the film structure was uniform.
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