High-k dielectric and metal gate stack with minimal overlap with isolation region and related methodsMichael P Chudzik,William K Henson,Renee T Mo,Jeffrey W Sleightmag(2011)引用 31|浏览3暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要