Synthesis of Metal Silicides by Low Energy Ion ImplantationP R Poudel,L J Mitchell,Jianyou Li,Brian P Gorman,Arup Neogi,Bibhudutta Rout,J L Duggan,F D McdanielBulletin of the American Physical Society(2008)引用 23|浏览13暂无评分关键词ion implantationAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要