Nano-structured ZnO/ITO based SO2 detector in room temperature operation

ZnO Nanostructured thin film of thickness 200nm was deposited on quartz by spray pyrolysis technique; further interdigitated ITO electrodes were fabricated by lithography. Compositional, surface morphology and electrical characterization of ZnO nanostructure thin film was done using X-ray photo electron spectroscopy (XPS), Secondary electron microscopy (SEM), and current-voltage (I-V) measurement technique respectively. SO ₂ sensing was done by using a sealed container with the help of Keithley2400 SMU and MATLAB interface. It was observed that ZnO exhibited good response on exposure to SO2 gas.