Deformable MEMS mirror with membrane actuated by application of torqueVladimir A Aksyuk,Omar D Lopez,F Pardo,Maria Elina Simonmag(2003)引用 24|浏览1暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要