Mechanism of Oxygen Redistribution During Ultra-Shallow Junction Formation in SiliconOleksandr Oberemok, D V Gamov,V G Litovchenko, B M Romanyuk,V Melnik,V P Klad Ko,Vesselin Popov,O Yo Gudymenkomag（2013）引用 23|浏览2暂无评分关键词diffusion,xds,junction,arsenic,gettering,ion implantation,performance,interface,oxygenAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
