Morphology evolution and copper doping of chemical vapor deposited aluminum thin films
mag(1998)
关键词
thin film,scanning electron micrograph,diffusion equation,particle size distribution,copper,empirical model,surface roughness,diffusion model
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要