Evolution Of Structural And Optical Properties Of Photocatalytic Fe Doped Tio2 Thin Films Prepared By Rf Magnetron Sputtering

AIP Conference Proceedings(2014)

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摘要
Undoped and Fe doped TiO2 thin films have been prepared by RF magnetron sputtering. Pure TiO2 thin film exhibited an amorphous-like nature. With increase in iron concentration (0-0.1 at%), the films exhibited better crystallization to anatase phase. Red shift of absorption edge was observed in the UV-vis transmittance spectra. At higher Fe concentration (0.5 at%), onset of phase transformation to rutile is noticed. Photocatalytic properties of pure and 0.1 at% Fe doped TiO2 thin films were investigated by degradation of methylene blue in UV light, visible light and light from Hg vapor lamp. 70% degradation of methylene blue was observed in the presence of Fe doped film in comparison with 3% degradation in presence of pure TiO2 film when irradiated using visible light for 2 h.
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关键词
Fe-TiO2 thin film, RF magnetron sputtering, anatase, micro strain, photocatalytic activity
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