Fluorinated monomers, fluorinated polymers having polycyclic groups with fused 4-membered heterocyclic rings, useful as photoresists, and processes for microlithographyAndrew Edward Feiring,Frank L Schadt,Viacheslav A Petrov,Bruce E Smart,William B Farnhammag(2008)引用 23|浏览6暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要