508 Evaluation of the Chemically Reacted Layer by Chemical Mechanical Micro Machining

Micro mechanical machining technology has been studied for fabricating smaller size structures and enhancing form accuracy. The dimensions of structures are generally determined by the size of the micro mechanical tool. However, the size of the mechanical tool is limited by the mechanical properties of the tool, such as elasticity limit, yield strength, and fracture and buckle that is caused by the machining resistance force. To overcome these drawbacks and enhance the surface quality and form accuracy in mechanical micro machining, this paper proposes a new method of micro machining with the aid of chemical solutions. The chemically reacted layer on the substrate is thought to restrict the plastic deformation of work material. As a result, it is expected to have the lower machining force, tool wear reduction and high form accuracy compared to other methods. In this study, we carried out an experiment on both the brittle and ductile material.