Piezoelectric Films and Coatings for Device Purposes

Piezoelectric devices generally require film thicknesses in the range 2-200µm and have a response which is perturbed by the substrate. Sol gel and sol gel composite technology provide a manufacturable process for many purposes with a piezoelectric coupling coefficient for 40ptm thick PZT approaching k t = 0.34. Techniques such as laser machining or micromolding are required for patterning thick devices. Measurement and applications of piezoelectric coatings in medical imaging, high temperature ultrasonics and flexure devices are discussed.