Method of depositing a film using a turntable apparatusHiroaki Ikegawa, Masahiko Kaminishi,Kosuke Takahashi,Masato Koakutsu,Jun Ogawamag(2015)Cited 24|Views16No scoreAI Read ScienceMust-Reading TreeExampleGenerate MRT to find the research sequence of this paperChat PaperSummary is being generated by the instructions you defined