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Merged Photonic Crystal Slot Waveguide: Confining Slow Modes In Tiny Volumes

Matthieu Roussey,A K Bera,Petri Stenberg,Seppo Honkanen,Markku Kuittinen

PHOTONIC AND PHONONIC PROPERTIES OF ENGINEERED NANOSTRUCTURES IV（2014）

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Abstract
In this proceeding we are describing the optimization of a silicon slot waveguide coated with titanium dioxide deposited by Atomic Layer Deposition. In addition we show the characterization of a photonic crystal cavity directly patterned on a slot waveguide.
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Photonic crystals, slot waveguides, silicon photonics, four-wave mixing, atomic layer deposition, e-beam lithography
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