Simulation of SiGe Epitaxial Growth for RF-Bipolar Transistors Stephan Marksteiner,Herbert Schafer,T F Meister, A Spitzermag(1998)引用 0|浏览2暂无评分关键词TCAD Simulation, Simple Simulation Model, Steep Profile, Process Recipe, Simple Rate EquationAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要