Effect of Microstructure on the Electrical Characteristics of Sol-Gel Derived PZT Thin Films

The effects of the microstructure of PZT sol-gel thin films, processed using different solutions, on their material and electrical properties have been studied. The films have different degrees of preferred orientation of the perovskite crystals as well as different grain size. The material characteristics are evaluated using SEM micrographs and XRD. Correlation of these material properties with the electrical properties for both NVRAM and DRAM applications is made.