Low Voltage Detection Methods By Microcolumn

S. K. Choi, S. Babin, T. S. Oh,D. W. Kim,S. Ahn,H. S. Kim

2011 18TH IEEE INTERNATIONAL SYMPOSIUM ON THE PHYSICAL AND FAILURE ANALYSIS OF INTEGRATED CIRCUITS (IPFA)（2011）

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摘要

Low voltage microcolumn operated by less than 1keV beam energy and having high probe beam current can readily obtain low voltage images without bias voltages to sample. It has the main advantage of obtaining the information concentrated on thin surface layers, and can also obtain sample current images from sample without any detection devices. A sample current image has been analyzed using commercial Monte Carlo software.

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关键词

silicon,copper,photodiodes,scanning electron microscopy,low voltage,detectors,monte carlo methods

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