Magnetron plasma processing apparatus Makoto Hasegawa,O Intellectual Property Div, T Matsushita,Keiji Horioka,Isahiro Hasegawa,Toshihisa Nozawa, O Operational Head Office, Yoshio Ishikawa, Masahito C Hiratsuka,Satoshi Kanekomag(2000)Cited 23|Views3No scoreAI Read ScienceMust-Reading TreeExampleGenerate MRT to find the research sequence of this paperChat PaperSummary is being generated by the instructions you defined