The Design of Kalman Filter for Nano-Positioning Stage

The noise signal influences the stage positioning accuracy in the process of the nano stage motion, for which designs a Kalman filter to filter out noise effectively. The model of nano-positioning stage is established. Then the motion of stage is estimated by using Kalman filtering model, and the filtering effect of Kalman filter can be observed in the Matlab. Experimental results show that Kalman filtering can effectively reduce the positioning deviation, which is less than 4nm, and positioning accuracy has been improved significantly. Kalman filter has a good effect on filtering and can meet the requirement of positioning precision for nano-positioning stage.