Surface Modification for Novel Nanosensors Creation

V Smatko,Ivan I Donchev,E Kovacova, V Strbik, S Zyryn

NATO Science for Peace and Security Series B Physics and BiophysicsNanodevices and Nanomaterials for Ecological Security（2012）

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摘要

A new method of sensor surfaces treatment has been proposed. The main feature of the developed approach is the creation of a large specific surface on silicon substrate and TiO2 nanotube arrays that are formed in surface trenches. A modified surface allows fabricating various types of sensors.

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关键词

TiO2 nanotube arrays, Anisotropic wet etching, Focused ion beam etching

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