Using thin undoped TEOS with BPTEOS ILD or BPTEOS ILD alone to improve charge loss and contact resistance in multi-bit memory devicesNing Cheng,Minh Van Ngo,Hirokazu Tokuno, Lu You,Angela T Hui, Yi He, Brian Mooney, Joan Yeimei Yang,Mark T Ramsbeymag(2007)引用 21|浏览1暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要