Effect of Low-Energy Ions on Plasma-Enhanced Deposition of Cubic Boron Nitride M Torigoe, Seiji Fukui,Kungen Teii,S MatsumotoBulletin of the American Physical Society(2015)引用 23|浏览5暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要