Ordinary and Extra-Ordinary Dielectric Function of 4h- and 6H-SiC in the 0.7 to 9.0 eV Photon Energy Range

O. P. A. Lindquist,K. Järrendahl,H. Arwin, S. Peters, J. T. Zettler,C. Cobet,N. Esser,D. E. Aspnes,A. Henry,N. V. Edwards

MRS Online Proceedings Library（2011）

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摘要

We report ordinary <ε ⊥ > and extra-ordinary <ε ‖ > dielectric function data of 4H- and 6H-SiC from 0.7 to 9.0 eV. These data, which were obtained by with spectroscopic ellipsometry, are in good qualitative agreement with trends recently reported in ab initio calculations.

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extra-ordinary,h-sic

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