Observer-Based Sliding Mode Control Of A 6-Dof Precision Maglev Positioning Stage

A six DOF positioning stage that can provide both millimeter range of motion and high accuracy is presented. The proposed solution is based on the use of hybrid maglev actuators to control each DOF, integrated by a decoupling sliding mode controller in combination with a modified passive nonlinear observer. Simulation shows that high accuracy multi-axis motion can be achieved. The workspace of the proposed application is 1116 mu mx1000 mu mx1000 mu m in translation and 13.3 mradx 16.8 mradx13.0 mrad in rotation.