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SOI based mechano-optical pressure sensor using a folded micro ring resonator

S M C Chakkalakkal Abdulla,P J Harmsma, R A Nieuwland,J M Pozo Torres, M H J Lemmen,H Sadeghian Marnani, J H Van Den Berg, P Bodis, P Buskens

mag（2012）

Cited 23|Views9

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Key words

pressure sensor,electronics

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