SiO 2 /HfO 2 multilayers: impact of process parameters and stack geometry on the optical and structural properties
Frontiers in Optics(2008)
摘要
Loss, stress and surface roughness in ion-beam deposition of HfO2/SiO2interference coatings are assessed for different growth conditions to understand how to improve the performance of these coatings for high power laser applications.
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关键词
resistance,absorption,lasers,surface roughness,mechanical stress,optical coatings
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