Fabrication of Rib Waveguides in Germanium-Selenium Chalcogenide Glass through Electron Beam Direct Writing

Galen B Hoffman,Wei Zhou,R Sooryakumar,Ronald M Reano

Frontiers in Optics（2009）

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摘要

We report the fabrication of direct write rib waveguides in Ge0.2Se0.8 chalcogenide glass films on thermally oxidized silicon substrates using electron beams. Numerical modeling of the fundamental TE mode yields an effective index of 2.0.

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waveguides

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