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Endurance Characterization of Ferroelectric Cell in 64Mb FRAM Device By Analyzing the Space Charge Concentration

E S Lee,Y M Kang,D J Jung,Yeon Ki Hong,Jung Hoon Park,S K Kang,J H Kim,Hyeong Su Kim,W W Jung,W S Ahn,J Y Jung,J Y Kang,D Y Choi, H K Goh,Sae Yoon Kim,Sang Yeoup Lee,H S Jeong

Extended Abstracts of the 2007 International Conference on Solid State Devices and Materials（2007）

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关键词
ferroelectric cell,fram device,space charge concentration
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