Effective Attenuation Length For Lanthanum Lutetium Oxide Between 7 And 13 Kev

To obtain quantitative depth information from hard X-ray photoemission spectroscopy, the effective attenuation length (EAL) is required. In this paper, the EAL was determined for LaLuO3 for electron kinetic energies between 7 and 13 keV. As a result, the EAL is in the range of 100-150 angstrom for the investigated photon energies. In addition, higher binding energy orbitals of La and Lu were measured and are discussed. LaLuO3 is a promising high-k dielectric for future nano-scaled MOS devices. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4789524]