Determination Of The Thermal Conductivity Of Diamond-Like Nanocomposite Films Using A Scanning Thermal Microscope

Amorphous "diamond-like/quartz-like'' composites a-(C:H/Si:O) constitute a novel class of diamond-related materials with a number of unique bulk and surface properties. Using a thermal imaging microscope we have determined the thermal conductivity (kappa(s))of a-C:H/Si:O) films deposited on Si(001) substrates. We have developed a calibration procedure which makes it possible to use this method for the evaluation of not only topographical variations in kappa(s) but also absolute values. (C) 1998 American Institute of Physics. [S0003-6951(98)00339-8].