Spontaneous nanoclustering of ZrO[sub 2] in atomic layer deposited La[sub y]Zr[sub 1−y]O[sub x] thin filmsF Roozeboom,Marko Tuominen,F Bakker,M L Kaiser,W Dekkers,R A M Wolters,E Tois,J H Klootwijk,K B Jinesh,W F A BeslingApplied Physics Letters(2008)引用 23|浏览37暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要