Transmission Electron-Microscopy Study Of Chemical-Vapor-Deposited Diamond By A Side-View Method

Yasuyuki Goto,Kazuaki Kurihara,Yumiko Sawamoto,T Kitakohji

APPLIED PHYSICS LETTERS（1992）

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摘要

The initial growth of synthetic diamond by dc plasma-jet chemical vapor deposition was studied with a transmission electron microscope by a side-view method. Both diamond particles and beta-SiC particles were observed on the Si substrate. Si atoms in the substrate were etched clearly by the plasma jet except beneath diamond particles.

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关键词

electron microscopy,electron diffraction,transmission electron microscope,body centered cubic,particle size distribution,transmission electron microscopy

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