Acoustic Wave Characterization Of Silicon Phononic Crystal Plate

In this paper, characterization of megahertz Lamb waves in a silicon phononic crystal based asymmetry filter by laser Doppler vibrometer is demonstrated. The acoustic power from a piezoelectric substrate was transmitted into the silicon superstrate by fluid coupling method, and measured results show that the displacement amplitude of the acoustic wave in the superstrate was approximately one fifth of that in the piezoelectric substrate. Effect of the phononic bandgap on the propagation of Lamb wave in the silicon superstrate is also measured, and the result shows that the phononic crystal structure could reflect part of the acoustic waves back. (C) 2015 AIP Publishing LLC.