Enhancing the platinum atomic layer deposition infiltration depth inside anodic alumina nanoporous membrane
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A(2015)
Abstract
Nanoporous platinum membranes can be straightforwardly fabricated by forming a Pt coating inside the nanopores of anodic alumina membranes (AAO) using atomic layer deposition (ALD). However, the high-aspect-ratio of AAO makes Pt ALD very challenging. By tuning the process deposition temperature and precursor exposure time, enhanced infiltration depth along with conformal coating was achieved for Pt ALD inside the AAO templates. Cross-sectional scanning electron microscopy/energy dispersive x-ray spectroscopy and small angle neutron scattering were employed to analyze the Pt coverage and thickness inside the AAO nanopores. Additionally, one application of platinum-coated membrane was demonstrated by creating a high-density protein-functionalized interface. (C) 2014 American Vacuum Society.
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Key words
depth,membranes,engineering,x ray spectroscopy,neutron diffraction,small angle scattering,scanning electron microscopy,platinum,aspect ratio,deposition
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