Optical MEMS Pressure Sensors Incorporating Dual Waveguide Bragg Gratings on Diaphragms
IEEE Sensors Journal（2016）
摘要
The wavelength shift of single Bragg grating integrated into a waveguide in optical MEMS pressure sensors gives inaccurate result due to the cross sensitivity caused by multiple external factors including temperature. Novel dual waveguide Bragg gratings (WBGs)-based microelectromechanical system pressure sensors with silicon micromachined diaphragm are presented here. The sensor consists of a curv...
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关键词
Temperature sensors,Gratings,Optical waveguides,Bragg gratings,Sensitivity,Temperature measurement
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