Interface Mechanics Of Adhesiveless Microtransfer Printing Processes

JOURNAL OF APPLIED PHYSICS(2014)

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摘要
Microtransfer printing is a versatile process for retrieving, transferring, and placing nanomembranes of various materials on a diverse set of substrates. The process relies on the ability to preferentially propagate a crack along specific interfaces at different stages in the process. Here, we report a mechanics-based model that examines the factors that determine which interface a crack will propagate along in microtransfer printing with a soft elastomer stamp. The model is described and validated through comparison to experimental measurements. The effects of various factors, including interface toughness, stamp geometry, flaw sizes at the interfaces, and nanomembrane thickness, on the effectiveness of transfer printing are investigated using a fracture-mechanics framework and finite element modeling. The modeling results agree with experimental measurements in which the effects of interface toughness and nanomembranes thickness on the transfer printing yield were examined. The models presented can be used to guide the design of transfer printing processes. (C) 2014 AIP Publishing LLC.
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关键词
Microcontact Printing,Nanoscale Patterning,Nanoimprint Technology,Soft Lithography
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