Fabrication Of An Aluminum-Porous Alumina Sensor By In Situ Monitoring Anodization Of Thin Aluminum Films
JOURNAL OF APPLIED PHYSICS(2015)
摘要
The aim of the present work is to optimize a well-known plasmon-based aluminum/porous anodic alumina sensor. This kind of sensors is produced by partial electrochemical anodization of an aluminum film, while the remaining, non-anodized metallic film is used for supporting the propagation of surface plasmons. The anodized porous alumina is preferable against a flat solid surface as it presents much larger sensing area and thus enhanced detecting efficiency. In this work, a novel method for controlling the remaining aluminum film thickness is reported, based on a simple optical reflectance measurement during the electrochemical anodization of the initial metallic film. (C) 2015 AIP Publishing LLC.
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关键词
thin aluminum-porous films,situ</i>monitoring anodization,sensor
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