Plasma Resistance Evaluation And Characteristics Of Yttria Ceramics Sintered By Using Calcination Yttria

The evaluation of plasma resistance and the characteristics of yttria ceramics fabricated by calcination yttria as a starting material without dopants under an oxidation atmosphere was investigated. Regardless of the starting materials, as-received, and calcined yttria powder, XRD patterns showed that all samples have Y2O3 phase. The three cycling process inhibited a large grain, which occurs frequently during the yttria sintering, and a high density ceramic with a homogeneous grain size was obtained. The grain size of the sintered ceramic was affected by the starting powders. The smaller the grain size, the larger were the Young's modulus and KIC. Compared to Al2O3 and ZrO2 ceramics, yttria ceramics showed a 3 times larger plasma resistance and a 1.4 similar to 2.2 times lower weight loss during the plasma etching test, respectively.