X-Ray Diffraction Study Of Gan Grown On Patterned Substrates

Owing to its great potential in optoelectronic devices, a lot of effort has recently been put into improving the crystal quality of heteroepitaxial GaN. In this study, GaN layers grown on patterned GaN/sapphire substrates are non-destructively investigated by X-ray diffraction techniques. The effect of the patterning is characterized by determining the strain and lattice tilt and twist in the overgrown GaN layers. High resolution X-ray diffraction (HRXRD) scans and reciprocal space maps (RSMs) were utilized for this purpose. Synchrotron radiation X-ray topography (SR-XRT) was used to examine the microstructure of the samples. The patterning was found to significantly improve the crystal quality of the GaN layers, especially by reducing the amount of edge dislocations. (C) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim