Nanomechanical Analysis of a UV Treated Ag Thin Film Based on a Three-Step Oxidation Model
Journal of Nanoscience and Nanotechnology(2015)
Abstract
Nanoindentation was used as the main method to measure the change in nanomechanical properties on the surface of an Ag thin film due to UV treatment. The 4-point probe method, X-ray diffraction (XRD), and atomic force microscopy (AFM) were used to measure the electrical, crystallographic, and morphological properties, respectively. During a UV treatment time of between 1 and 3 minutes, the sheet resistance increased dramatically to 0.55 Ω/sq. (the sheet resistance was 0.16 Ω/sq. prior to UV treatment) and these results were supported by a proportional decreased in XRD intensity. Thereafter, the sheet resistance decreased and the XRD intensity increased in response to increases in UV treatment time. These results were related to a change in crystal structure from Ag to AgOx, which could also have caused the change in sheet resistance. Based on these results, we propose a 3-step oxidation model of an Ag thin film according to UV treatment time. This proposal has been proven by nanoindentation testing.
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Key words
Nanoindentation,UV Treatment,Ag Thin Film,T-OLED,Surface Oxidation
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