Metal PVD honey-combs coated with TIO 2 and Al 2 O 3 via PECVD suitable for sensoring applications

Economical and self-assembling polystyrene ‘Breath Figures’ method has been used to obtain a large polymeric 3D honey-comb structure substrate successively coated with metallic ductile films with thickness of few hundreds of nanometers deposited via DC magnetron sputtering. Finally, the obtained metallic 3D honey-comb structures have been functionalized by ceramic coatings such as titanium dioxide (TiO2) and aluminum oxide (Al2O3) via radio frequency-plasma enhanced chemical vapor deposition (RF-PECVD) having the role of the active parts.