Tailoring thermal stability behaviour of magnetic thin films by hybrid oblique gradient-composition sputtering

An experimental study of the magnetic and microwave properties together with the thermal stability of FeCoHf films fabricated by a novel hybrid oblique gradient-composition sputtering technique is presented. It was found that both ferromagnetic resonance frequency and thermal stability can be significantly enhanced by changing the oblique deposition angle. The result is tentatively explained by separating the role of each contribution of the magnetic anisotropy such as stress-induced anisotropy, shape anisotropy and pair-ordering anisotropy. On the basis of this experimental result, it is suggestive that this method is an effective way to fabricate thin films with good microwave performance oriented for high-frequency applications.