A high-precision calibration method for MEMS gyroscopes

MEMS (Micro-Electromechanical Systems) gyroscopes are widely used in many industrial products. However, observations often include many errors because of being not precisely calibrated and effectively compensated. This paper first proposes the idea that the excitation signal is designed using Persistent Excitation Signal Criterion in the modern control theory. The cosine angular velocity signal is selected as the excitation signal and proved to be Persistent Excitation Signal. The calibration scheme and data-acquisition program are proposed. Cross-correlation algorithm is used to solve calibration parameters. In order to verify the effectiveness and stability of the proposed calibration, we conduct simulations and in-depth discussions. Considering the temperature features of MEMS gyroscopes, the temperature control turntable is chosen to generate the excitation signal. Then we take turns to calibrate the parameters by the traditional method and the proposed method. The verification experiment is designed and implemented to verify the accuracy of calibration parameters. The results of the comparison and verification experiment show that the proposed method is an efficient and simple high-precision calibration method.